提出并研究以硅片为基体、采用固/液相等离子喷涂工艺制备固体氧化物燃料电池复合电极.固相送料方式喷涂阳极和阴极;悬浮液束流送料方式喷涂电解质.用CCD监测悬浮液束流与等离子射流形态,其特征分析结果表明最佳注射气压为0.25MPa.采用SEM和EDAX对电极涂层微观组织和组分进行分析,结果表明:喷涂距离是影响电解质涂层形貌、沉积效率和孔隙率的关键参数;悬浮液束流送料喷涂可以制备薄的(涂层平均厚度约为25μm)、组织精细的(粒度为2～4μm)、致密的(孔隙率约为2.15%)电解质涂层.
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