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  4. 冷坩埚原理及其在多晶硅制备中的应用

材料工程, 2011, (7): 90-96. doi: 10.3969/j.issn.1001-4381.2011.07.019

冷坩埚原理及其在多晶硅制备中的应用

黄锋 1, , 陈瑞润 2, , 郭景杰 3, , 丁宏升 4, , 杨劼人 5, , 苏彦庆 6, , 傅恒志 7,

1.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

2.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

3.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

4.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

5.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

6.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

7.哈尔滨工业大学材料科学与工程学院,哈尔滨150001

基金项目:   华中科技大学材料成形与模具技术国家重点实验室开放基金(2010-P10)   国家自然科学基金(50804012)  

关键词： 冷坩埚 , 电磁感应 , 多晶硅 , 提纯

Cold Crucible Theory and Its Application in Preparing of Multicrystalline Silicon

综述了冷坩埚技术的原理、特点与技术要求,重点介绍了电磁冷坩埚技术的工艺性能与影响因素,总结了各因素对冷坩埚性能的影响规律,最后概述了冷坩埚技术在多晶硅提纯与成型制备中的优势和应用,并展望了其未来的发展.

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