通过中频脉冲磁控溅射的方法,在玻璃基底上沉积得到了表面均匀性好、致密度高的钛薄膜.在NH4 F/乙二醇+H2O电解液体系中对该钛膜进行电化学阳极氧化.结果表明:30V恒电压下,当NH4F浓度从0.5％(质量分数,下同)增加到1％时,阳极氧化后形成的TiO2膜层逐渐从纳米孔结构转变成纳米管结构;当NH4F浓度低于0.75％时,随阳极氧化电压的增加,形成的TiO2膜层不会出现从纳米孔到纳米管结构的转变.
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