采用非平衡闭合场磁控溅射方法在Cr12MoV冷作模具钢表面制备不同Mo含量的CrMoN涂层,通过XRD、SEM、显微硬度和磨损试验分析涂层的相结构、表面性能和耐磨性.实验结果表明,CrMoN涂层均呈面心立方结构,无明显的柱状晶,其厚度随Mo含量的增加而增厚.CrMoN涂层显著提高了Cr12MoV钢的表面硬度和耐磨性,尤其是中等Mo含量(20.72%Mo)的涂层.经18h冲击磨损后,该涂层的磨损速率(5.3×10-5mm3/h)明显低于未表面处理试样(1.0×10-3mm3/h),微区逐层剥落的疲劳磨损为主要磨损机制.然而,低Mo含量涂层磨损速率略高于未表面处理试样,磨损机制从疲劳磨损转变为三体磨粒磨损.
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