采用非平衡磁控溅射方法在H13钢和SDC99钢表面制备不同Mo含量的CrMoN涂层,采用HX-1000型显微硬度计、V-LUX1000型原位纳米力学测试系统测定涂层的显微硬度和纳米硬度,并通过划痕和摩擦磨损试验考察了涂层与基体的结合强度及其摩擦磨损性能.结果表明,不同Mo含量的CrMoN涂层均能明显地提高基体的承载能力和耐磨性能,其中Mo含量为20.72 at%的涂层承载能力、同基体的结合力以及耐磨损性均最好,基体硬度更高的SDC99钢表面涂层性能比H13钢的更好.
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