采用非平衡闭合场磁控溅射技术,在冷作模具钢Cr12MoV表面制备不同偏压CrMoN涂层.通过XRD、SEM、显微硬度和磨损试验分析等方法考察涂层的相结构、力学性能与耐磨性.实验结果表明:呈面心立方结构的CrMoN涂层不同程度地强化了基体表面(HV0.25N1 000～1 800),摩擦系数降低至0.3～0.35,经18h磨损试验后,60、75 V偏压沉积的涂层的磨损体积(2.01×10-3mm3)约为未处理试样磨损体积(10.01×10-3mm3)的1/5.涂层磨损机理主要为“微犁沟”的磨粒磨损.
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