应用拉曼光谱(Raman)等测试方法分析了不同热处理温度对PVD技术制备的Graphit-iC类石墨碳膜涂层的组织结构、显微硬度、结合强度和磨损率的影响规律.结果表明:随温度升高,涂层发生sp3→sp2结构转变,相对强度比ID/IG增加,石墨化倾向增大；涂层磨损率在25～250℃温度区间内保持较低的水平,当温度继续上升后表面显微硬度及结合力降低,磨损率显著增大,耐磨性降低.
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