以快速等离子烧结法(SPS)制备的BiFeO3块体为靶材,用激光脉冲沉积(PLD)法在不同衬底上制备了BiFeO3 (100)/LaNiO3 (100)/Si(100)、BiFeO3(111)/LaNiO3 (111)/SrTiO3 (111)、BiFeO3(110) /Pt/TiO2/SiO2/Si、BiFeO3 (110) LaNiO3 (110)/Pt/TiO2/SiO2/Si不同择优取向的薄膜,并对薄膜进行了XRD和SEM分析.X射线衍射结果表明,BiFeO3薄膜外延沉积在导电层衬底上,并且它们具有相同的高度取向.SEM分析表明,薄膜上的晶粒是柱状形态,表面光滑致密且颗粒分布非常均匀,晶粒的边界和尺寸也能被清晰地观察到.通过铁电铁磁性能研究,BiFeO3(111)择优取向性能最佳.SrTiO3衬底上(111)取向的BiFeO3薄膜铁电剩余极化值达到了30.3μC/cm2,漏电流为1.0×10-3A/cm2,饱和磁化强度为20.0kA/m.
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