采用溅射法制备的纳米结构CuO为敏感电极,钇稳定氧化锆(YSZ)为固体电解质制成了一种混合位型NO2传感器.采用X射线衍射仪(XRD)和扫描电子显微镜(SEM)分别表征了CuO敏感电极的相组成和微观形貌.研究了Cu的不同溅射时间对CuO敏感电极微观结构及传感器敏感性能的影响.结果表明,CuO颗粒随着Cu溅射时间的增长而增大,制成的传感器在600~700℃范围内对25~400mL/m3的NO2具有较好的敏感性能,传感器响应信号与NO2 浓度的对数呈现良好的线性关系,其中60min,Cu传感器在650℃时灵敏度达41.47mY/decade,对于400mL/m3的NO2,90%的响应时间和恢复时间分别约为160、260s,体积分数0~10%的CO2对传感器的响应几乎没有影响,传感器具有较好的敏感度、重现性和稳定性.
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