采用电化学刻蚀方法,在n型高阻单晶硅片上进行有序多孔阵列的制备.就腐蚀液配方的改变对制备的多孔阵列结构的形貌进行观察研究.研究表明,在其它相同的实验条件下,改变组元乙醇的比例,制备的多孔阵列结构形貌会有显著的差别.随着腐蚀液中组元乙醇含量的减小,制备的多孔阵列结构中的孔的表面及断面形貌逐渐显得光滑、平整.当改变腐蚀液配方中的HF浓度时,制备的多孔阵列结构中的孔的大小及深度也随之改变,对此的机制进行了探讨.
参考文献
| [1] | Uher J .3D nutron detectors[D].Czech:Czech Technical University,2007. |
| [2] | Badel X;Linnro J;Kleimann P et al.Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray Imaging detectors[J].IEEE Transactions on Nuclear Science,2004,51(03):1001-1005. |
| [3] | P. Kleimann;J. Linnros;C. Frojdh;C.S. Petersson .An X-ray imaging pixel detector based on scintillator filled pores in a silicon matrix[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2001(1):15-19. |
| [4] | Uher J;Frojdh C;Jakubek J;Kenney C;Kohout Z;Linhart V;Parker S;Petersson S;Pospisil S;Thungstrom G .Characterization of 3D thermal neutron semiconductor detectors[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2007(1):32-37. |
| [5] | 田菲 .由光辅助电化学刻蚀制备大面积p型硅微通道板[D].上海:华东师范大学,2009. |
| [6] | 汪婷,黎学明,李武林,文军.近规整多孔硅电化学制备与表征[J].功能材料,2011(05):869-871,876. |
| [7] | Thonissen M.;Arensfischer R.;Gluck O.;Kruger M.;Luth H.;Berger MG. .ILLUMINATION-ASSISTED FORMATION OF POROUS SILICON[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1996(1/2):21-24. |
| [8] | Jang, H.S.;Choi, H.-J.;Kang, S.M. .Formation of p-silicon wire by electrochemical etching using positive photoresist as an etch mask in organic electrolyte[J].Electrochemical and solid-state letters,2011(8):D84-D88. |
| [9] | 张光辉,孔令峰,潘倩,黎学明.电化学阳极氧化条件对阵列多孔硅的影响[J].功能材料,2009(06):966-969. |
| [10] | Chao K J;Kao S C;Yang C M et al.Formation of high aspect ration macropore array on P-type silicon[J].Electrochemical and Solid State Letters,2000,3(10):489-492. |
| [11] | Smith R L;Collins J D .Porous silicon formation mechanisms[J].Journal of Applied Physics,1992,71(08):R1. |
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