通过利用光学显微镜对ZTS晶体(100)面的台阶推移过程进行实时观察,对不同溶液供应速度及不同过饱和度下的台阶生长动力学进行了研究.结果表明,随着溶液供应速度S的增大,台阶平均推移速率先增大后减小.溶液供应速度S≈1.2rnL/min时,台阶平均推移速率达到最大.而在静止的生长溶液中,台阶平均推移速率随着过饱和度σ的增大呈非线性增大,同时确定了生长死区σd和台阶平均推移速率急剧增大时的临界过饱和度值σ*,并计算了不同过饱和度阶段的台阶动力学系数和台阶活化能.
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