MEMS微电容具有高比容量、高储能密度和抗高过载等特点,在微电源系统、引信系统以及物联网等技术领域具有广泛的应用前景。设计制作了一种三维结构的聚吡咯/氧化石墨烯电极的 MEMS 微电容。该微电容由三维结构集流体、功能薄膜、凝胶电解质和BCB封装构成,其三维结构集流体是基于RIE刻蚀等微加工工艺加工实现的,而功能薄膜是通过电化学沉积工艺在集流体表面沉积聚吡咯/氧化石墨烯制备而成的,具有阻抗低、容量高、循环性能好的优点。电极的结构表征表明,聚吡咯中充分掺杂了氧化石墨烯,功能材料微观结构规整。器件电化学测试结果表明,放电电流为3mA 时,MEMS 微电容具有30μF 的电容值,比容量达到7mF/cm2,在4000次充放电循环后,器件比容量仍保持在90%,电容量无明显衰减,具有稳定的电容性能和良好的循环性能。
With the advantage of height capacity,higher energy storage density and resistance to high overload , microcapacitor has broad prospect of application in micro power systems,fuze system and things networking technology field.The MEMS microcapacitor with a three dimensional microstructure was designed.This micro-capacitor was consists of current collectors with three dimensional structure,feature films as electrodes,gel e-lectrolyte and BCB packaging.The three dimensional structure of current collectors was prepared by the deep reactive ion etching method.The feature films was deposited on the current collector surface by an electrochem-ical polymerization for polypyrrole/graphene oxide synthesis.The structural characterization of the electrode show that the polypyrrole has been doped graphene oxide fully and the microstructure of the feature films was structured.The electrochemical behaviors of microcapacitor was investigated by electrochemical tests.The mi-crocapacitor presents 30μF capacitance value,7mF/cm2 specific capacity at discharge current 3mA,remained at 90% specific capacity after 4000 times charging and discharging cycle.The results indicate the microcapacitor has the stable capacitance performance and good cycle performance.
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