采用磁控溅射的方法制备了带有 Ni 保护层和Zr-Co-Re(Re代表稀土元素)主体层的堆栈层薄膜吸气剂。通过X射线光电子能谱仪(XPS)分析了薄膜吸气剂内部 O 元素的含量分布，研究了薄膜吸气剂中Ni层的防氧化作用和机理。研究表明：(1)Ni/Zr-Co-Re堆栈层薄膜吸气剂在160℃保温3h 的条件下可以有效激活，并具有高于 Zr-Co-Ni 单层薄膜吸气剂的吸气性能；(2)Ni保护层降低了吸气剂的被氧化程度，促进了表面吸附的 H2分子的解离和扩散。
Non-evaporable getter (NEG)stack layer thin films including protective layer of Ni and subj ect layer of Zr-Co-Re (Re indicating rare earth element)were prepared by RF magnetron sputtering.XPS was used to measure the content distribution of O element in the thin film getters and the anti-oxidation mechanism was in-vestigated.The following results were concluded:(1)the stack Ni/Zr-Co-Re getter film activated at 160℃ for 3h shows higher gas absorption property than Zr-Co-Re single layer film;(2)the protective layer of Ni could not only protect the getter film from being oxidated but also improve the dissociation and diffusion of H2 molecule.
参考文献
| [1] | Gorecka-Drzazga, Anna .Miniature and MEMS-type vacuum sensors and pumps[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2009(12):1419-1426. |
| [2] | Tenchine, L.;Baillin, X.;Faure, C.;Nicolas, P.;Martinez, E.;Papon, A.-M. .NEG thin films for under controlled atmosphere MEMS packaging[J].Sensors and Actuators, A. Physical,2011(1):233-239. |
| [3] | Benvenuti C;Chiggiato P;Costa Pinto P et al.Vacuum properties of TiZrV non-evaporable getter flms[J].Vac-uum,2001,60:57-65. |
| [4] | Petti D;Cantoni M;Leone M et al.Activation of Zr-Co-rare earth getter films:an XPS study[J].Applied Sur-face Science,2010,256:6291-6296. |
| [5] | J.G. Bu;C.H. Mao;Y. Zhang.Preparation and sorption characteristics of Zr-Co-RE getter films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2012:69-72. |
| [6] | M. Mura;C. Paolini .A new generation of getter-coated sputter ion pumps for XHV applications[J].Vakuum in Forschung und Praxis,2007(4):13-16. |
| [7] | Lafferty J M;Rubin L G .Foundations of vacuum science and technology[J].Physics Today,1999,52:86. |
| [8] | Zhang Yan;Wei Xiuying;Mao Changhui et al.Prepara-tion and pumping characteristics of Ti-7.5wt%Mo getter[J].Journal of Alloys and Compounds,2009,485:200-203. |
| [9] | 顾为,熊玉华,杜军,毛昌辉,尉秀英,秦光荣.ZrVFe吸气剂激活过程研究[J].稀有金属,2007(04):501-505. |
| [10] | 崔国栋,杨川.热处理对Fe-O、Fe-N-O薄膜透射率的影响[J].功能材料,2004(z1):522-524. |
| [11] | Lozano MP.;Fraxedas J. .XPS analysis of the activation process in non-evaporable getter thin films[J].Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films,2000(1):623-627. |
| [12] | F. Sutara;N. Tsud;K. Veltruska;V. Matolin .XPS and ESD study of carbon and oxygen chemistry on TiZrV NEG[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2001(2/4):135-139. |
| [13] | Dean J A.Lange's handbook of chemistry[M].Ameri-ca:McGraw-Hill Inc,1998 |
| [14] | Siegbahn P E M;Blomberg M R A;Bauschlicher C W .The dissociation of H2 on the Ni(100)surface[J].Jour-nal of Chemical Physics,1984,81:2103-2111. |
| [15] | Harris J;Andersson S .H2 dissociation at metal surfaces[J].Physical Review Letters,1985,55:1583-1586. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%