采用射频磁控溅射法在石英玻璃衬底上成功制备了不同 C 掺杂浓度的 ZnO∶C 薄膜，借助于 X射线衍射仪(XRD)、霍尔测试(Hall)、X 射线光电子谱(XPS)和拉曼散射光谱(Raman)等测试手段系统研究了 ZnO 薄膜的结构、电学以及拉曼特性并分析了 C 在ZnO 薄膜中存在形式。结果表明，所有薄膜都呈纤锌矿结构并具有高度的 c 轴择优取向。随着 C 掺杂浓度的增加，薄膜的 n 型导电性能不断增强，其主要原因是ZnO 薄膜中的 C 替代 Zn 位起施主作用。
Different concentration of ZnO∶C thin films were deposited on quartz glass substrates by a radio-fre-quency (RF)magnetron sputtering technique.The structure,Raman and electrical properties of ZnO∶C film were investigated by X-ray diffractometer,Raman scattering spectrum and Hall measurement system.Then, we explore the role of C in the ZnO∶C film.The results indicate that all films perform the ZnO wurtzite struc-ture with preferred c -axis orientation.The n-type conductivity enhances with the increase of C dopant,and the main explanation to be that C substitute for zinc site and act as donor.
参考文献
| [1] | Nakahara K;Akasaka S;Yuji H et al.Nitrogen doped Mgx Zn1-x O/ZnO single heterostructure ultraviolet light-emitting diodes on ZnO substrates[J].Applied Physics Letters,2010,97:013501. |
| [2] | 张欢欢,李智,苗春雨,马春雨,张庆瑜.射频磁控溅射制备Mn掺杂ZnO薄膜的结构与光学性能[J].功能材料,2011(z3):536-540. |
| [3] | 解晓宇,孙慧卿,王度阳,许轶,韩世洋,肖永能.Na,N双受主共掺杂p型ZnO第一原理研究[J].功能材料,2012(02):257-260. |
| [4] | 郑继,王新强,曾冰.非磁性元素Cu掺杂ZnO纳米层的磁性性质第一性原理计算[J].重庆理工大学学报（自然科学版）,2013(11):126-129. |
| [5] | Sanjeev K;Nayak;Markus E et al.Anisotropic ferro-magnetism in carbon-doped zinc oxide from first-princi-ples studies[J].Physical Review B:Condensed Matter,2012,86:054441. |
| [6] | Xue H;Xu X L;Chen Y et al.Influence of Ag-doping on the optical properties of ZnO films[J].Applied Surface Sinence,2008,255:1806. |
| [7] | Li, W.J.;Kong, C.Y.;Ruan, H.B.;Qin, G.P.;Huang, G.J.;Yang, T.Y.;Liang, W.W.;Zhao, Y.H.;Meng, X.D.;Yu, P.;Cui, Y.T.;Fang, L. .Electrical properties and Raman scattering investigation of Ag doped ZnO thin films[J].Solid State Communications,2012(2):147-150. |
| [8] | S. Karamat;R. S. Rawat;T. L. Tan;P. Lee;S. V. Springham;Anis-ur-Rehman;R. Chen;H. D. Sun .Exciting Dilute Magnetic Semiconductor: Copper-Doped ZnO[J].Journal of Superconductivity and Novel Magnetism,2013(1):187-195. |
| [9] | Carvalho A;Alkauskas A;Pasquarello A et al.A hybrid density functional study of lithium in ZnO:stability,ionization levels,and diffusion[J].Physical Review B:Condensed Matter,2009,80:195205. |
| [10] | Kresse G.;Furthmuller J. .EFFICIENT ITERATIVE SCHEMES FOR AB INITIO TOTAL-ENERGY CALCULATIONS USING A PLANE-WAVE BASIS SET[J].Physical Review.B.Condensed Matter,1996(16):11169-11186. |
| [11] | Kresse G;Furthmüller J .Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set[J].Computation materials science,1996,6:15. |
| [12] | Kresse G.;Joubert D. .From ultrasoft pseudopotentials to the projector augmented-wave method[J].Physical Review.B.Condensed Matter,1999(3):1758-1775. |
| [13] | T. Prasada Rao;M.C. Santhosh Kumar .Realization of stable p-type ZnO thin films using Li-N dual acceptors[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2011(35):8676-8682. |
| [14] | D. Ferrah;J. Penuelas;C. Bottela;G. Grenet;A. Ouerghi .X-ray photoelectron spectroscopy (XPS) and diffraction (XPD) study of a few layers of graphene on 6H-SiC(0001)[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2013(Sep.):47-56. |
| [15] | Sun L W;He H P;Hu L et al.Evidences for the car-bon-nitrogen complex in ZnO nanostructures with very high nitrogen doping[J].Phys Chem Chem,2013,15:1369-1373. |
| [16] | Zang Hang;Wang Zhiguang;Pang Lilong .Study on the Raman scattering properties of ion-implanted ZnO thin films[J].Acta Phys Sin,2010,59(07):4831-4836. |
| [17] | Li P;Deng S H;Zhang L et al.Comparisons of ZnO codoped by group ⅢA elements(Al,Ga,In)and N:a first-principle study[J].Phys B,2010,19:117102. |
| [18] | Wang J B;Zhong H M;Li Z F et al.Raman study of N+-implanted ZnO[J].Applied Physics Letters,2006,88:101913. |
| [19] | Wang XB;Song C;Geng KW;Zeng F;Pan F .Luminescence and Raman scattering properties of ag-doped ZnO films[J].Journal of Physics, D. Applied Physics: A Europhysics Journal,2006(23):4992-4996. |
| [20] | Calleja J M;Cardona M .Resonant Raman scattering in ZnO[J].Physical Review B:Condensed Matter,1977,16:3753-3761. |
| [21] | Al Asmar R;Atanas J P;Ajaka M et al.Characteriza-tion and Raman investigations on high-quality ZnO thin films fabricated by reactive electron beam evaporation[J].Journal of Crystal Growth,2005,279:394-402. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%