提出一种利用感光溶胶-凝胶法结合紫外光刻技术制备 Al2 O3微细图形的方法。以 Al (O-Sec-Bu)3为前驱物,β-二酮类配体 H(C10 H12 O2)为化学修饰剂,合成了稳定的、具有良好感光性的含 Al 金属螯合物,进而制备出相应的感光薄膜。研究了薄膜的紫外和红外光谱特性及其在紫外光辐照条件下的变化过程,结果表明金属螯合物薄膜在251,321和368 nm处各存在较强的紫外吸收峰。随着紫外光照时间的增加,吸收峰下降,Al2 O3/H 薄膜表现出明显的感光特性。结合紫外光刻技术,可制备出不同形状尺寸的Al2 O3微细图形,其最小线宽可达437 nm。
In this paper,an novel approach for fabricating Al2 O3 microstructure based on photosensitive sol-gel and UV laser lithography was introduced.Stabilized and UV photosensitive Al-contained metal chelate and thin films were prepared with Al(O-Sec-Bu)3 and H(C10 H12 O2 )as the precursor and chemical modifier,respective-ly.The characteristics of UV and IR spectra of the films and their variations in the process of UV irradiation were investigated.The results showed that the gel films had absorption peaks at about 251,321 and 368 nm due to the formation of chelate complex.These peaks gradually decreased with irradiation in time,which indicated the photosensitive properties of the Al2 O3/H gel films.several size and profile Al2 O3 micro-patterning were fabricated by using UV lithography and the minimum line-size obtained in this paper was about 437 nm.
参考文献
| [1] | DNA Sensing Using Nanocrystalline Surface-Enhanced Al_2O_3 Nanopore Sensors[J].Advanced functional materials,2010(8):1266. |
| [2] | Jin Jiao;Fu Liangjie;Ouyang Jing et al.3D ordered mac-ro-mesoporous indium doped Al2 O3[J].Cryst Eng Comm,2013,15:6046-6053. |
| [3] | 池华敬,郭帅,熊凯,王双,陈革,章其初.直流反应溅射沉积Al2O3薄膜及其在SS-AlN金属陶瓷太阳吸收涂层的应用[J].真空科学与技术学报,2012(05):385-389. |
| [4] | Sheu Jinnkong;Yeh Yuhsiang;Tu Shangju et al.Im-proved output power of GaN-based blue LEDs by forming air voids on Ar-implanted sapphire substrate[J].Journal of Lightwave Technology,2013,31(08):1318-1322. |
| [5] | Z. Li;J. Waldron;T. Detchprohm;C. Wetzel;R. F. Karlicek;T. P. Chow .Monolithic integration of light-emitting diodes and power metal-oxide-semiconductor channel high-electron-mobility transistors for light-emitting power integrated circuits in GaN on sapphire substrate[J].Applied physics letters,2013(19):192107-1-192107-3. |
| [6] | Guo Hao;Zhang Xiong;Chen Hongjun et al.High-per-formance GaN-based light-emitting diodes on patterned sapphire substrate with a novel patterned SiO2/Al2 O3 passivation layer[J].Applied Physics Express,2013,6:072103. |
| [7] | Hongjun Chen;Hao Guo;Peiyuan Zhang;Xiong Zhang;Honggang Liu;Shengkai Wang;Yiping Cui .Enhanced Performance of GaN-Based Light-Emitting Diodes by Using Al Mirror and Atomic Layer Deposition-TiO_2/Al_2O3 Distributed Bragg Reflector Backside Reflector with Patterned Sapphire Substrate[J].Applied physics express,2013(2):22101.1-22101.4. |
| [8] | Gui Quanhong;Zhou Fuqiang;Wang Guigen et al.Re-search progress in the preparation of patterned sapphire substrates for high-efficiency and high-power GaN-based LEDs[J].Journal of Functional Materials,2012,43(21):2886-2892. |
| [9] | Y. J. Lee;J. M. Hwang;T. C. Hsu;M. H. Hsieh;M. J. Jou;B. J. Lee;T. C. Lu;H. C. Kuo;S. C. Wang .Enhancing the Output Power of GaN-Based LEDs Grown on Wet-Etched Patterned Sapphire Substrates[J].IEEE Photonics Technology Letters,2006(10):1152-1154. |
| [10] | Yang Xeng;Woo Jongchang;Um Doo Seung et al.Dry etching of Al2 O3 thin films in O2/BCl3/Ar inductively coupled plasma[J].Transactions on Electrical and Elec-tronic Materials,2010,11(05):202-205. |
| [11] | Low-cost micro-lens arrays fabricated by photosensitive sol-gel and multi-beam laser interference[J].Photonics and Nanostructures,2012(4):667-673. |
| [12] | Zhezhe Wang;Gaoyang Zhao;Lin Lin .Fabrication of surface: relief gratings and their laser induced damage resistance properties[J].Journal of Sol-Gel Science and Technology,2012(2):480-484. |
| [13] | Wang, Z.;Zhao, G.;Zhang, X.;Heguang, L.;Zhao, N. .Fabrication of two-dimensional lattices by using photosensitive sol-gel and four-beam laser interference[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2011(3):1223-1227. |
| [14] | 常建华;董绮功.波谱原理及解析[M].北京:科学出版社,2001 |
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