研究了一种非晶硅薄膜的激光低损伤晶化工艺方法，通过在非晶硅薄膜上淀积氮化硅薄膜方法研究激光退火改善非晶硅薄膜的质量。实验结果表明，随着激光退火频率的增加，有无增透膜样品的衍射强度均会出现先下降后上升再下降的现象。增透膜样品的最强衍射峰出现在10~15 Hz 激光退火后，而无增透膜样品的最强衍射峰则出现在20 Hz 激光退火后。SEM分析表明，应用增透膜可以降低非晶硅薄膜的激光退火脉冲频率，并减少非晶硅薄膜激光损伤，可作为一种低损伤的激光晶化工艺。
Using Si3 N4 thin film as the antireflective layer low damage laser annealing process on amorphous sili-con thin films was studied.XRD results showed that the diffraction intensity of amorphous silicon thin film with an antireflective film increased first,then decreased with the increase of laser frequency.The antireflective samples showed the highest diffraction peaks as annealing by the laser with frequencies from 10 to 15 Hz.For amorphous samples,the highest diffraction peaks appeared when annealing by the laser of 20 Hz.SEM results showed the reflective thin film could efficiently decrease the frequency of annealing laser frequencies,and the corresponding damage in the amorphous silicon thin films was reduced.It was confirmed that the annealing process with the antireflective thin film was an effective crystallization techniques with low laser damage on amorphous silicon films.
参考文献
| [1] | Khan, F.;Singh, S.N.;Husain, M. .Effect of illumination intensity on cell parameters of a silicon solar cell[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2010(9):1473-1476. |
| [2] | Tsung-Chieh Cheng;Chin-Hsiang Cheng;Zhu-Zin Huang;Guo-Chun Liao .Development of an energy-saving module via combination of solar cells and thermoelectric coolers for green building applications[J].Energy,2011(1):133-140. |
| [3] | I. Gordon;S. Vallon;A. Mayolet;G. Beaucarne;J. Poortmans .Thin-film monocrystalline-silicon solar cells made by a seed layer approach on glass-ceramic substrates[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2010(2):381-385. |
| [4] | Tang, W.;Hai, J.;Dai, Y.;Huang, Z.;Lu, B.;Yuan, F.;Tang, J.;Zhang, F. .Recent development of conjugated oligomers for high-efficiency bulk-heterojunction solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2010(12):1963-1979. |
| [5] | Aqing Chen;Kaigui Zhu .Computer simulation of a-Si/c-Si heterojunction solar cell with high conversion efficiency[J].Solar Energy,2012(1):393-397. |
| [6] | Z.Said-Bacar;P. Prathap;C. Cayron;F. Mermet;Y. Leroy;F. Antoni;A.Slaoui;E. Fogarassy .CW laser induced crystallization of thin amorphous silicon films deposited by EBE and PECVD[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2012(23):9359-9365. |
| [7] | 李新利,卢景霄,李瑞.微晶硅p-i-n薄膜太阳电池研究进展[J].功能材料,2010(05):746-750. |
| [8] | 林揆训,林璇英,梁厚蕴,池凌飞,余楚迎,黄创君.非晶硅薄膜的低温快速晶化及其结构分析[J].物理学报,2002(04):863-866. |
| [9] | 耿学文,李美成,赵连城.薄膜太阳能电池硅衬底陷光结构的研究进展[J].功能材料,2010(05):751-754. |
| [10] | Grozdanic, D;Slunjski, R;Rakvin, B;Dubcek, P;Pivac, B;Radic, N;Bernstoff, S .Structural analysis of amorphous Si films prepared by magnetron sputtering[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2009(1):126-129. |
| [11] | Tabata, A.;Nakano, J.;Mazaki, K.;Fukaya, K. .Film-thickness dependence of structural and electrical properties of boron-doped hydrogenated microcrystalline silicon prepared by radiofrequency magnetron sputtering[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2010(23/24):1131-1134. |
| [12] | 于威,何杰,孙运涛,朱海丰,韩理,傅广生.碳化硅薄膜脉冲激光晶化特性研究[J].物理学报,2004(06):1930-1934. |
| [13] | 庞宏杰,王存山,张凯舒,苏元军,裴继斌.非晶硅薄膜激光晶化及其结构分析[J].应用激光,2007(01):18-20,24. |
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