在316L不锈钢基体上,采用磁控溅射镀铝、热处理、氧离子注入复合工艺制备 FeAl/Al2 O3防氚层,并利用 XRD、SEM、EDS 分别对膜层进行了相结构、表面形貌、化学成分等分析.结果表明,磁控溅射制备了质量良好的铝膜,最佳工艺参数为温度170℃,溅射功率1400 W；热处理生成了含 FeAl 相的过渡层,并提高了膜基结合力,在700℃,120 min 时,膜基结合力达到最大值62．5 N；最终由离子注入生成的Al2 O3膜层由α、γ相组成,涂层厚度约360 nm,抗热震性能较好,在600℃下该涂层使316L不锈钢的氘渗透率降低3个数量级.
The FeAl/Al2 O3 coatings for the tritium permeation barrier of the 316L stainless steel were prepared by magnetron sputtering、heat treatment and oxygen implantation.The phases、surface morphologies and chemi-cal composition of the coatings were characterized by X-ray diffraction,scanning electron microscopy and energy dispersive spectrdmeter individually.The results show that the high quality Al thin films were successfully de-posited with magnetron sputtering process on 316L stainless steel,170 ℃ and 1 400 W were the optimized tech-nological parameters.The transition layer was produced after heat treating,it is mainly composed of FeAl and with high bonding strength,the maximum bonding strength was 62.5 N after heat treatment under 700 ℃, 120 min.After oxygen implantation,it obtainedαandγphase alumina coatings with 360 nm thickness and high thermal shock resistance,the tritium permeation resistance was improved 3 orders of magnitude high than the 316L stainless steel bulk.
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