用多弧离子镀技术在炮钢表面沉积两种TixAl1－xN薄膜,薄膜在空气中850℃恒温氧化10 h,采用XRD、SEM和 EDS对薄膜微观结构进行分析,检测其恒温抗氧化性能。结果表明,Ti0．5 Al0．5 N薄膜的抗高温氧化性能明显优于Ti0．7 Al0．3 N薄膜。Ti0．7 Al0．3 N薄膜由于基体Fe元素扩散至薄膜表面,使其表面形成Fe2 O3和Fe3 O4氧化物,导致薄膜过早失效；而 Ti0．5 Al0．5 N 薄膜的表面形成致密且粘附性好的Al2 O3和TiO2混合氧化物,表现出优良的抗高温氧化性,同时基体元素和薄膜元素的适度扩散能提高薄膜与基体的结合力。
Two Tix Al1-x N films were deposited on gun steel substrates by means of multi-arc ion plating tech-nology.Specimens were isothermally oxidized for 10 h at 850 ℃ in air,and the morphologies and compositions of the two films were investigated by XRD,SEM and EDS.The results showed that Ti0.5 Al0.5 N film exhibits obviously better oxidation resistance than Ti0.7 Al0.3 N film.For Ti0.7 Al0.3 N film,the oxides of Fe2 O3 and Fe3 O4 formed on its surface due to the element Fe diffusion from the substrate,which caused the premature failure of the Ti0.7 Al0.3 N film.In contrast,a mixture oxides of Al2 O3 and TiO2 formed on the surface of the Ti0.5 Al0.5 N film,which showed excellent high temperature oxidation resistance.Meanwhile,the moderate diffusion of ele-ments improved the adhesion between the film and the substrate.
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