根据当前物联网以及无线传感网络的需求,以MEMS技术为依托,结合压电效应,提出了一种单悬臂梁阵列式压电式能量采集器。在分析压电能量采集器结构力学特性的基础上,详细介绍了两种不同尺寸微结构的设计、加工和测试。采用 ANSYS 软件仿真,得出两种微结构的谐振频率分别为3．9和4 kHz；利用溶胶-凝胶法制备出15和20层的 PZT 压电功能薄膜,电镜扫描其厚度分别为1849,2667 nm,AFM对比表面形貌其粗糙度分别为1．8和2．11 nm,后者致密更好,颗粒较小,相变温度相对比较高。
In view of the demand of current internet and wireless sensor networks,an energy harvester was pro-posed based on piezoelectric effect and MEMS technology.Based on mechanical properties analysis of the piezoe-lectric energy harvester,design,simulation,fabrication and test of piezoelectric energy harvesters with two dif-ferent sizes were described.The PZT piezoelectric thin film was statically simulated with ANSYS,and the first-order resonance frequencies of the two microstructures were 3.9 and 4 kHz,respectively.The PZT piezoelectric thin film of the energy harvester was manufactured with sol-gel method.Electron microscope scanning the 1 5 and 20 layers film show the thickness was 1 849 and 2 667 nm,respectively,the comparision of the AFM sur-face topography the roughness 1.8 and 2.11 nm,the latter density better,smaller particles,phase transition temperature was relatively higher.
参考文献
| [1] | Gilbert J M;Balouchi F .Comparison of energy harvesting systems for wireless sensor networks[J].Int J Autom,2008,5(4):334-347. |
| [2] | Soobum Lee;Byeng D Youn;Byung C Jung .Robust segment-type energy harvester and its application to a wireless sensor[J].Smart Materials & Structures,2009(9):095021-12. |
| [3] | Han Mengdi;Yuan Quan;Sun Xuming et al.Design and fabrication of intergrated magnetic MEMS energy har-vester for low frequency application[J].Journal of Micro Electronmechamical System,2014,23(1):204-212. |
| [4] | Staley M E;Flatau A B.Characterization of energy har-vesting potential of Terfenol-D and galfenol[A].San Di-ego,2005:630-640. |
| [5] | Koukharenko E;Beeby S P;Tudor M J et al.Micro electro mechanical system vibration powered electromag-netic generator for wireless sensor applications[J].Micro system Technologies,2006,12(10-11):1071-1077. |
| [6] | Cavallier B;Berthelot P;Nouira H.Energy harves-ting using vibrating structures excited by shock[A].Rotterdam,2005:943-945. |
| [7] | Anton SR;Sodano HA .A review of power harvesting using piezoelectric materials (2003-2006)[J].Smart Materials & Structures,2007(3):R1-R21. |
| [8] | Shun-Chiu Lin;Wen-Jong Wu .Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method[J].Journal of Micromechanics and Microengineering,2013(12):125028-1-125028-12. |
| [9] | Gang Tang;Bin Yang;Jing-quan Liu;Bin Xuа;Hong-ying Zhu;Chun-sheng Yang.Development of high performance piezoelectric d_(33) mode MEMS vibration energy harvester based on PMN-PT single crystal thick film[J].Sensors and Actuators, A. Physical,2014:150-155. |
| [10] | Amarasinghe Rdao D V;Tonyama T .Design and fabrica-tion of a miniaturized six-degree-of-freedom piezoresis-tive accelerometer[J].Journal of Micromechanies and Micro Engineering,2005,15:1745-1753. |
| [11] | 段俊萍,王春水,张斌珍,王万军.混有Fe3O4纳米颗粒的PDMS薄膜磁力激励变形研究?[J].功能材料,2014(18):18099-18103,18106. |
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