采用自主开发的无氟化学溶液沉积法在(00l)LaAlO3单晶片上制备了 YBa2 Cu3 Oz(YBCO)超导薄膜。研究了高温热处理过程中不同成相气氛和渗氧温度对 YBCO 薄膜结构和性能的影响。采用 X 射线衍射仪对薄膜进行了织构分析，通过扫描电镜和原子力显微镜观察了薄膜的表面形貌。采用磁性能测试系统测量了薄膜的超导转变温度和磁化曲线。实验结果表明，在干燥的热处理气氛和400℃渗氧制备的 YBCO 薄膜具有更加优异的性能。
YBa2 Cu3 Oz (YBCO)superconducting films were deposited on (00l)LaAlO3 single crystal substrate by self-developed fluorine-free chemical solution deposition approach.The effect of treating gas during high tem-perature heat treatment process and oxygen treatment temperature on structure and performance of YBCO films has been investigated.The texture was analysed by x-ray diffraction and the surface microstructure was ob-served by SEM and AFM.Superconducting transition temperature and magnetization curves were obtained by PPMS system.The results show that YBCO film treating in dry gas and oxygenated at 400 ℃ has more excel-lent performance.
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