国内对分子纳米层作为铜扩散阻挡层的研究，以及对分子纳米层性能测试的仪器和方法比较欠缺。因此，本文介绍了表征有机分子纳米层作为铜扩散阻挡层的测试方法，包括热性能测试，电学性能测试，粘接性能测试，形貌测试和分子模拟。重点介绍了粘接性能测试的方法和原理，并分析了由此技术带来的新研究方向。
The investigations of organic molecular nanolayers (MNLs)as copper diffusion barriers are few re-searched,and the characterization techniques to analyze the MNLs are limitedly developed in China.Therefore, the techniques to characterize the MNLs were introduced in this mini-review,including thermal stable property, electrical property,interfacial adhesion,morphological observation and molecular simulation.The method and principle of determining interfacial adhesion were emphasized;the novel research interests arising from this technique were analyzed as well.
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