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  4. 微区电沉积技术及其研究进展?

功能材料, 2016, 47(10): 10036-10043. doi: 10.3969/j.issn.1001-9731.2016.10.007

微区电沉积技术及其研究进展?

徐晨 1, , 刘德荣 2, , 刘磊 3, , 胡文彬 4, , 吴忠 5,

1.上海交通大学 金属基复合材料国家重点实验室,上海,200240

2.上海交通大学 金属基复合材料国家重点实验室,上海,200240

3.上海交通大学 金属基复合材料国家重点实验室,上海,200240

4.上海交通大学 金属基复合材料国家重点实验室,上海,200240

5.上海交通大学 金属基复合材料国家重点实验室,上海,200240

基金项目:   国家高技术研究发展计划(863计划)资助项目(2013AA031604)  

关键词： 微区电沉积 , 3D结构 , 技术概况

Progress on research and technology of localized electrochemical deposition

Keywords： localized electrochemical deposition , three-dimensional structures , technical overview

微纳尺度的三维结构构造技术存在成本高、效率低、环境依赖性强等问题，微区电沉积技术的发展在一定程度上解决了上述问题。介绍了微区电沉积的技术原理、过程控制以及研究现状，讨论了微区电沉积研究中的参数优化、过程模拟与技术发展，并对微区电沉积技术未来的研究重点与发展趋势进行了展望。

Fabrication techniques for three-dimensional microstructures and nanostructures are limited by their high cost and low efficiency besides their dependence on environmental control,while the development of local-ized electrochemical deposition to a certain degree solved these problems.In this paper,process simulation and development and parameters optimization are discussed through the introduction of the concept and theory,the process control and the research status.In the end,the research emphasis and future trend are prospected ac-cording to the previous work.

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