表面经过不同化学修饰，金刚石薄膜会表现出不同的表面导电性能。这使得其在平面微电子、微电化学器件开发方面有着广阔的应用前景。总结国内外的研究，结合近年来的研究成果，详述了不同表面修饰金刚石薄膜的实现方法，讨论了表面修饰金刚石薄膜的几何结构和电子结构，并对当前有关表面修饰金刚石薄膜导电机理的主要观点进行了分析。在此基础上，提出了今后不同表面修饰金刚石薄膜导电性的研究重点。
By different surface modification,the diamond films would show various surface conductivities.This makes it have a broad application prospect in the development of in-plane micro-electronics and micro-electro-chemical devices.By summarizing the research at home and abroad,combined with the recent research results of our group,the preparation methods of the various surface-modified diamond films are described in detail.In ad-dition,the equilibrium geometries and electronic structure of the surface-modified diamond films are discussed. Finally,the main opinions on the conducting mechanism of the surface-modified diamond films are also ana-lyzed.On the basis of the above,the remarkable research points on the surface conductivity of the diamond films with different surface modification in the future are proposed.
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