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热障涂层材料(TBC)能够应用于航空发动机涡轮叶片等许多尖端领域,这种材料是一种能够缓冲外界热量进入表面合金的低热导率材料.研究表明,空气是一种近乎最低的低热导率材料,所以在热障涂层材料中加入空气能够有效提高热量缓冲作用.将采用感应耦合等离子体(ICP)深沟刻蚀硅的表面,在金属钛表面电解氧化形成多孔的氧化层薄膜以及泡沫铜、泡沫镍的多孔结构来系统阐述这一理论的可行性.使用了扫描电镜(SEM)、原子力显微镜(AFM)和热导率测量仪对微观形貌和热导率进行了表征测量,并利用计算机仿真对多孔结构进行了进一步的热传导性能分析.

The thermal barrier coating (TBC) used for aero engine turbine blade requires a low thermal conductivity layer to buffer the surface heat wave into the base super alloys.Since air has a nearly lowest thermal conductivity, adding the air or increase the porosity would improve the thermal buffering effect.In this paper this principle was demonstrated by using the deep trenched silicon wafer with ICP deep trench etching technique, by ionized porous Ti surface, by foamed copper and foamed nickel and by porous YSZ TBC film.SEM, AFM and thermal conductivity measurements were used to characterize the morphology and thermal insulating properties.Computer simulation was also conducted to analyze the thermal conducting properties using the porous structure in the thermal buffer structure.

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