以DowCorning 186硅橡胶为介电弹性体(DE)基底膜,以精细Ag纳米颗粒和导电石墨掺杂的硅橡胶为电极,组装了不对称DE电致动膜.两电极膜存在显著的力学性能、导电性能差异,其厚度、模量、面电阻分别为96.8 μm、26.6 MPa、8.42 kΩ/cm2和179.3 μm、32.6 MPa、 3.87 kΩ/cm2.导入4 kV、2 Hz、25%占空比的激励信号,不对称DE膜发生上下振动,中心偏离平衡位置的最大振幅为3.6 mm,偏离角为17.4°.利用激光位移传感器研究了偏振位移与驱动电压、频率之间的关系,结果表明,偏振位移随驱动电压的增加而增加,随激励频率的增加而减小.同时利用ANSYS模拟了不对称DE泵膜的应力输出、功率、流量,计算结果可为研制新型智能可控微泵提供实验数据和研究基础.
Dielectric elastomers (DE) actuator with asymmetric electrodes is assembled, where DowCorning 186 silicone rubber is acted as the dielectric elastomer substrate, and silicone elastomers of 184 doped by Ag nanoparticles and conductive graphite are used to fabricate the asymmetric electrodes.There exist evident difference between the mechanical and conductive properties, and the corresponding electrode film thicknesses, moduli, surface resistance are 96.8 μm, 26.6 MPa, 8.42 kΩ/cm2 and 179.3 μm, 32.6 MPa, 3.87 kΩ/cm2, respectively.Under the excitation signal of 4 kV voltage, 2 Hz frequency, and 25% duty cycle, the largest amplitude deviation from the equilibrium position of the asymmetric DE membrane is 3.6 mm, and the deviation angle is 17.4°.The relationship among the excited displacement, driving voltage and the frequency are studied by using a laser displacement sensor.The results show that the excited displacement increases with the driving voltage, and decreases with the increase of frequency.Meanwhile, ANSYS software is used to simulate the outputted stress, power, and flow of the asymmetric DE pump, and the calculation results can provide experimental data and research foundations for developing a new intelligent controllable micropump.
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