研究了1Cr18Ni9Ti不锈钢基体上斜入射溅射Ni-7Cr-8Al涂层及其在 10000℃空气中形成的氧化膜的组织结构.涂层采用 Ni-7Cr-8Al 合金靶磁控溅射方法制备.沉积过程中样品静止不动,名义入射角分别为0°和45°.这两种样品在本文中分别称为正入射和斜入射沉积涂层.研究结果表明:两种涂层的晶体结构均为f.c.c.γ-Ni,并且都具有典型的柱状晶组织结构,所不同的是,正人射沉积涂层的柱状晶垂直表面,斜入射涂层的柱状晶与法线间的角度大约为32.,并且后者看起来较疏松.在1000℃空气中50 h内,正入射沉积Ni-7Cr-8Al涂层表面可形成纯α-Al2O3保护性氧化膜,斜入射涂层氧化行为较复杂.氧化 10h 后的涂层表面为均匀致密的α-Al2O3 氧化物;氧化20 h后氧化膜主要为等轴晶形状 Fe2O3 和 NiCrO3,此外还有很多尺寸为几微米的小孔;氧化50 h后,氧化物发生大面积剥落,氧化膜内有大量孔洞,残留的表面氧化物主要由Fe2O3和NiCrO3组成.
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