本文采用一种新型的等离子体浸没式离子注入-离子束增强沉积的技术(PIII-IBAD),在Cr12MoV钢基体上制备出了TiN膜,对沉积膜的组织进行了光电子能谱分析,并对沉积膜进行了硬度检测、摩擦试验及磨痕形貌分析.试验结果表明,沉积膜中的组织为TiN、TiO2和Ti2O3,TiN膜具有高达Hv3200的高硬度和极其优良的摩擦性能.
参考文献
| [1] | Rossi S;Fedrizzi L;Leoni M et al.(Ti Cr) N and Ti/TiN PVD coatings on 304 stainless steel substrates:wear-corrosion behavior[J].Thin Solid Films,1999,350:161-167. |
| [2] | Munz W D;Hofmann D;Hartig K A .High rate sputtering process for the formation of hard friction-reducing TiN coatings on tools[J].THIN SOLID FILMS,1982,96:79-87. |
| [3] | M. Leoni;P. Scardi;S. Rossi;L. Fedrizzi;Y. Massiani .(Ti,Cr)N and Ti/TiN PVD coatings on 304 stainless steel substrates: texture and residual stress[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(2):263-269. |
| [4] | 李世直.用PCVD技术沉积TiN涂层的研究[J].金属热处理,1987(11):7-10. |
| [5] | Igasaki Y;Mitsuhahi H .The effects of substrate bias on the structural and electrical properties of TiN films prepared by reactive R F sputtering deposition[J].THIN SOLID FILMS,1980,70:17-24. |
| [6] | Huang Nan;Chen yuanru;Cai Guangjun .Research on the fatigue behavior of titanium based biomaterial coated with titanium nitride film by ion beam enhanced deposition[J].Surface and Coatings Technology,1996,88:127-131. |
| [7] | Wolt G K .Modification of chemical properties of materials by ion beam mixing and ion beam assisted deposition[J].Journal of Vacuum Science and Technology A,1992,A10(04):1757-1763. |
| [8] | 王钧石,陈元儒,陈庆武.Ti6Al4V等离子体浸没式离子注入[J].材料研究学报,2001(02):225-229. |
| [9] | Rinner M.;Ensinger W.;Assmann W.;Rauschenbach B.;Volz K. .Composition and microstructure of titanium nitride formed on Ti6Al4V by nitrogen plasma immersion ion implantation[J].Surface & Coatings Technology,1998(1/3):366-371. |
| [10] | HanS;Kim H;Lee Y et al.Plasma source ion implantation of nitrogen carbon and oxygen into Ti6Al4V alloy[J].Surface and Coatings Technology,1996,82:270-276. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%