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探讨了用液相法在钛合金表面沉积制备类金刚石膜的可能性,研究了沉积膜工艺条件对膜的影响,得出了适宜的沉积条件.结果表明,通过液相法可以沉积制备得到DLC膜,但与沉积条件有着密切的关系.当电压为1600~1850V、温度为60~62℃、电极间距为8~10mm、沉积时间大于36h时,才能在钛合金表面得到完整的DLC绝缘膜.

参考文献

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