贵金属具有良好的化学稳定性,高电导率和热导率,特有的电学、磁学、光学等性能,是发展半导体微电子技术必不可少的材料.文章综述了半导体器件欧姆接触、线路和电极、金属化系统、半导体包封,以及化合物半导体、液体金属离子源等用贵金属材料的应用和发展.
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