分别以乙醇和甲醇为电解液,采用电化学沉积法,在Si(100)表面得到碳薄膜.通过拉曼光谱和傅立叶变换红外光谱分析,证实所制备的薄膜具有类金刚石(DLC)结构特征.利用扫描电子显微镜对不同工艺制备的薄膜进行了表面形貌分析,并研究了样品在0.5 mol/L H2SO4溶液中的电化学交流阻抗谱.结果表明,与在乙醇体系中制得的DLC膜相比,在甲醇体系中制得的DLC膜具有更好的表面形貌和更好的抗腐蚀能力.
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