PCVD硬质膜是目前材料表面强化领域的研究热点.介绍了PCVD硬质膜的成膜理论、特点,讨论了等离子体引入化学气相沉积过程中所带来的一些变化,给出了现阶段PCVD成膜理论研究的现状、存在问题及发展趋势.
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