用XL30FEG扫描电镜对热丝化学气相沉积(HFCVD)法合成的金刚石颗粒的初期生长过程进行了研究.结果表明,金刚石在p-Si(100)基片上的初始形核密度很高,可达1010/cn2;在随后的颗粒长大过程中,颗粒快速长大,颗粒密度急剧减少;颗粒的长大速率随其尺寸的增大而减小,最后趋于一稳定值.
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