快速退火工艺对钛酸铋薄膜电学性能影响的研究

1.海军航空工程学院,理化教研室,烟台,264001

2.海军航空工程学院,电工教研室,烟,台,264001

基金项目: 国家自然科学基金

Effect of RTA on electrical character of Bi4Ti3O12 thin film

采用快速退火工艺处理的钛酸铋铁电薄膜,矫顽场Ec=9kV/cm,在室温下剩余极化强度 Pr=8μC/cm2;退火提高了钛酸铋薄膜的介电常数和材料的绝缘性,0.1M Hz附近薄膜材料的介电损耗tgδ<0.1.

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