采用电化学沉积法制备纳米ZnO多孔薄膜.并用XRD、SEM、XPS等方法研究了沉积电压对薄膜表面形貌及薄膜表面元素态的影响.结果表明:沉积电压越大,越有利于薄膜片状晶的长大,且形成多孔结构;随着沉积电压的增大,薄膜表面从缺氧到富氧,再到缺氧;沉积电压为-1.0V时,薄膜为层状结构,其2μm厚的薄膜在可见光范围内的光透射率为75%,光学带隙宽度为3.6eV.
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