研制一种三叠片型压电双晶片驱动器,上下两层为压电陶瓷材料PZT-5H,中间弹性层为铍青铜.利用激光测试仪LC-2400A及LV-1610对压电弯曲元件的输出位移、位移滞环、蠕变量及基频等特性进行实验测试.通过实验,确定压电弯曲元件的弹性层及压电晶片的厚度对其特性的影响,分析影响压电弯曲元件性能的因素.
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