采用直流磁控溅射技术在玻璃基板上沉积ITO薄膜,通过调整基板温度、薄膜厚度得到了最低方阻1.4Ω/□.薄膜透光率超过76%.对样品在150 kHz到18 GHz频段内电磁屏蔽效能采用屏蔽室法进行测试,1 G频率点得到的屏蔽效能最好,达到了54 dB,在屏蔽困难的低频段,150 kHz频率点的屏蔽效能达到24 dB.
ITO films were prepared by DC magnetron sputtering on glass substrate. By adjusting the substrate temperature and film thickness,minimum sheet resistance 1.4 Ω/□ was obtained, while transmittance beyond 76%. Using shielding room method, electromagnetic shielding effectiveness(SE) of the samples was tested in 150 kHz to 18 GHz frequency bands. Best SE 54 dB was obtained at 1 G frequency. Though electromagnetic in low frequency band was difficult to shield, SE at 150 kHz frequency could still reach 24 dB.
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