采用无压烧结,以AlN与Y2O3的摩尔分数为60%:40%作为烧结助剂进行碳化硅液相烧结,得到致密的烧结体.研究不同添加剂含量和不同保护气氛对烧结工艺的影响,并对烧结体的显微形貌和相进行分析.结果表明,高烧结助剂含量可在较低温度下实现致密化,但高温下液相挥发导致密度降低.与氩气作为保护气氛相比,氮气可抑制氮化铝的分解反应,有利于烧结.烧结体的晶粒均匀、细小,第二相均匀分布.烧结体的主相为6HSiC,并有氧氮化物的生成.
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