为实现对感应等离子技术制备电容器级钽粉粒度、形貌的控制,进行改变等离子工艺参数的粉体制备工艺试验,研究冷却气体流量、送人粉体的进口位置、等离子气氛对粉体粒度及其形貌的影响.结果表明,感应等离子工艺参数的变化可以显著改变制备粉体的性能.制备的钽粉全部为球形,感应等离子技术可以完成纳米级电容器钽粉的制备.
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