采用钒-钨混合溶胶及浸渍提拉法在玻璃基片上涂五氧化二钒膜,再通过氢还原法制备掺钨二氧化钒薄膜.采用XRD及XPS等测试方法对薄膜的相组成进行分析.研究了获得稳定的钨和钒混合溶胶及氢还原制备掺钨二氧化钒薄膜的条件.实验证明采用无机溶胶凝胶法制备掺钨二氧化钒薄膜可将二氧化钒薄膜的相变温度点降低到室温范围.在相变温度点附近,掺钨VO2薄膜的电阻率、近红外光透过率将发生较显著变化,可见光透过率随钨掺杂含量升高而降低.
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