利用完全抑制网络结构(FCN)对氢化非晶碳(α-C :H)膜组成进行模拟计算,得出形成质密α-C:H膜条件是H、SP2C和SP3C在其三元相图中应在一个三角形区域内.大量实验数据表明,模拟结果与实验结果相当吻合.在α-C:H中主要存在氢、四面体碳、乙烯、苯环和双苯等结构,它们相对含量在三角形区域内变化.该理论模拟对薄膜光学间隙的实验分析给予了很好的解释.
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