空芯光纤中沉积多晶态GeO2薄膜的实验研究

材料科学与工艺, 2001, 9(1): 52-55. doi: 10.3969/j.issn.1005-0299.2001.01.012

空芯光纤中沉积多晶态GeO2薄膜的实验研究

周桂耀 ^1, , 侯峙云 ^2, , 侯蓝田 ^3, , 何军 ^4, , 关兵 ^5,

1.燕山大学红外先纤与传感研究所,

2.燕山大学红外先纤与传感研究所,

3.燕山大学红外先纤与传感研究所,

4.吉林大学物理系,

5.吉林大学物理系,

基金项目: 国家高技术研究发展计划(863计划)(863-715-001-0212)

关键词：空芯光纤 , 二氧化锗 , 温度梯度 , 流速

An experimental study on chemical vapor deposition of poly-crystalline GeO2 thin film in hollow-core optical fibers

通过缩短高温炉与冷却器的距离，使化学反应区与沉积区的温度梯度增加到约9℃/mm，进而使GeCl4与O2可在内径为1.0mm的空芯石英管内壁沉积上颗粒度约0.1 μm、厚度为3.0μm的多晶态GeO2介质膜，使表面更加光滑，提高了光纤的传输性能，光纤的传输损耗小于0.8dB/m.

By reducing the distance between the high temperature furnace and the condenser, the temperaturegradient between high temperature and cold sections can be increased to 9 ℃/mm, so the poly-crystallineGeO2 with a grain size about 0.1 pμm and thickness 3.0 pμm can be deposited with GeCl4 and O2 on inner wallof hollow-core quartz capillary with an inner diameter of 1.0 mm. After that the inner surface becomessmooth, the transmission capability of hollow-core fibers can be improved, and the transmission loss will besuccessfully reduced to less than 0.8 dB/m.

参考文献

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