薄膜材料在集成电路、光电子技术、微结构传感器等微电子元件的应用日益广泛，其导热性能直接影响元器件的热噪声，进而对其可靠性和使用性能产生明显影响．薄膜材料导热性能及其测试研究愈益受人瞩目．为此，本文对薄膜材料导热性能及各种测试方法进行了综述，并在分析薄膜微结构模型的基础上，对计算薄膜有效热导率的不同预测方程进行了评述，从而可为薄膜材料的制备工艺和性能变化提供技术判据．
Thin film materials have been widely used in micro electronic devices such as integrated circuits,photo-electron devices and microstructure sensors. Heat conduction behavior of these kinds of materials has di-rect influence on the thermal noises and hence the reliability and performance of the devices. Thermal conduc-tivity is the most important thermal property which affects heat conduction in thin films. The present paper re-views the heat conduction behavior and the measureing techniques of thermal conductivity of thin film materi-als. Based on the analysis of the microstructurc model, the computational formulae for predicting the thermalconductivity of thin films are discussed.
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