综述了氮氧化硅的制备方法,系统介绍了无机固相反应法、化学气相沉积法和有机先驱体法制备氮氧化硅的工艺条件,阐述了终产品与原料和工艺条件的关系,并指出了各方法的优缺点和亟待解决的问题.着重介绍了聚合物先驱体的合成方法和结构影响因素,并详细介绍了热分解条件对氮氧化硅陶瓷成分和性能的影响.这对氮氧化硅陶瓷的成分设计、合成和性能研究具有重要指导意义.
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