为了克服半导体热处理炉中MoSi2发热元件的低温氧化问题,通过添加高Na2O粘土获得了由MoSi2/oxide复合材料制成的发热元件,考查了脱Na工艺前后MoSi2/oxide发热元件使用特性的变化.研究结果表明,脱Na工艺较好地解决了半导体制品热处理装置中石英玻璃管的失透问题,使发热元件的弯曲强度和高温蠕变特性有了明显地改善,提高了发热元件的使用寿命.
参考文献
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