为了研究℃Nx/TiNy复合交替超硬薄膜在不同温度下组织、结构和和性能变化等热稳定性问题,采用扫描电镜、X射线衍射、激光拉曼光谱、X射线光电子能谱等方法进行了系统的表征和测试.研究结果表明:复合膜的转变开始温度为400℃,当温度低于400℃时,复合膜的结构和性能较为稳定,而高于400℃时,复合膜开始发生分解;随着温度的增加,复合膜内部结构发生退化等破坏,导致膜的力学性能降低,但是其耐腐蚀性能得到改善.
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