陶瓷薄膜制备技术研究进展

材料科学与工艺, 2005, 13(4): 427-434. doi: 10.3969/j.issn.1005-0299.2005.04.025

陶瓷薄膜制备技术研究进展

田永生 ^1, , 陈传忠 ^2, , 王德云 ^3, , 陈丽霞 ^4, , 雷廷权 ^5,

1.山东大学,材料科学与工程学院,山东,济南,250061

2.山东大学,材料科学与工程学院,山东,济南,250061

3.山东大学,材料科学与工程学院,山东,济南,250061

4.山东电子器材厂,山东,济南,250103

5.哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001

基金项目: 山东省优秀中青年科学家科研奖励基金(02BS056)

关键词：陶瓷膜 , 制备工艺 , 进展

Research progress in fabrication of ceramic coatings

陶瓷薄膜具有耐磨、耐蚀、耐高温和抗微生物侵蚀等性能,在航天、化工机械、生物医学等行业获得了广泛的应用,从而推动着陶瓷薄膜的材质和制备工艺不断发展.综述了微弧氧化、溶胶凝胶和电泳沉积等制备陶瓷薄膜常用工艺的研究进展,分析了工艺参数对陶瓷膜组织结构和性能的影响.目前,制备工艺正向着电子束、离子束和激光束之间的组合和其工艺间复合的方向发展,陶瓷薄膜正向着多元膜、多层膜、梯度膜和纳米复合膜方向发展.

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陶瓷薄膜制备技术研究进展

Research progress in fabrication of ceramic coatings

参考文献