改性金刚石膜的形貌、结构和附着性能

材料科学与工艺, 2006, 14(1): 109-112. doi: 10.3969/j.issn.1005-0299.2006.01.033

改性金刚石膜的形貌、结构和附着性能

黄元盛 ^1, , 邱万奇 ^2, , 罗承萍 ^3, , 黄彩娥 ^4,

1.韶关学院,机电系,广东,韶关,512005

2.华南理工大学,机械工程学院,广东,广州,510640

3.华南理工大学,机械工程学院,广东,广州,510640

4.韶关学院,机电系,广东,韶关,512005

基金项目: 高等学校博士学科点专项科研项目(1999056121) 广东省博士启动基金(013004) 广东省博士启动基金(04300026)

关键词：改性金剐石膜 , 化学气相沉积 , 碳钨化合物 , 附着力性能 , 氧气

Morphology, structure and adhesion of modified diamond films

为了提高金刚石膜/基附着力,通过氧辅助使高温钨丝蒸发,在基底表面与碳氢基团反应生成纳米碳化钨,从而得到金刚石和纳米碳化钨混合的改性金刚石膜.用扫描电子显微镜、X射线衍射仪和压痕法研究了改性金刚石膜的形貌、结构和附着力性能.结果表明,碳钨化合物以纳米相存在于改性金刚石膜中.碳钨化合物的存在使改性金刚石膜的硬度下降,但是适当的碳钨化合物能使膜/基附着力性能得到较大提高.当氧气通入量为1.2sccm时,膜/基附着力性能最好.

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材料期刊网

改性金刚石膜的形貌、结构和附着性能

Morphology, structure and adhesion of modified diamond films

参考文献