采用氧乙炔喷枪对含有少量有机硅树脂的二氧化硅素坯进行单面烧蚀处理,利用XRD、SEM和SAED表征其高温物相变化.研究发现,高温烧蚀后的二氧化硅中有少量α-方石英析出,并伴有α-SiC、β-SiC新相生成,在此基础上研究了物态变化对材料高温介电性能的影响.
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