ZnO薄膜是一种应用广泛的半导体材料.近几年来,随着对ZnO的光电性质及其在光电器件方面应用的开发研究,ZnO薄膜成为研究热点之一.制备掺杂的p型ZnO是形成同质p-n结以及实现其实际应用的重要途径.近来已在p型ZnO及其同质结发光二极管(LEDs)研究方面取得了较大的进展.目前报道的p型ZnO薄膜的电阻率已降至10-3 Ω·cm量级.得到了具有较好非线性伏安特性的ZnO同质p-n结和紫外发光LED.本文就其最新进展进行了综述.
参考文献
| [1] | Guo XL.;Tabata H.;Kawai T.;Choi JH. .Fabrication and optoelectronic properties of a transparent ZnO homostructural light-emitting diode[J].Japanese journal of applied physics,2001(3A):L177-L180. |
| [2] | Bagnall DM.;Zhu Z.;Yao T.;Shen MY.;Goto T.;Chen YF. .High temperature excitonic stimulated emission from ZnO epitaxial layers[J].Applied physics letters,1998(8):1038-1040. |
| [3] | Gorla C.R.;Emanetoglu N.W.;Liang S.;Mayo W.E.;Lu Y.;Wraback M.;Shen H. .Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011 over-bar 2) sapphire by metalorganic chemical vapor deposition[J].Journal of Applied Physics,1999(5):2595-0. |
| [4] | WASHINGTON P L;ONG H C;DAI J Y et al.Determination of the optical constants of zinc oxide thin film by spectroscopic ellipsometry[J].Applied Physics Letters,1998,72(25):3261-3263. |
| [5] | J. M. Bian;X. M. Li;X. D. Gao;W. D. Yu;L. D. Chen .Deposition and electrical properties of N-In codoped p-type ZnO films by ultrasonic spray pyrolysis[J].Applied physics letters,2004(4):541-543. |
| [6] | SANMYO M;TOMITA Y;KOBAYASHI K .Preparation of p-type ZnO films by doping of Be-N bonds[J].Chemistry of Materials,2003,15:819-821. |
| [7] | Zhi-Zhen Ye;Fei Zhu-Ge;Jian-Guo Lu;Zheng-Hai Zhang;Li-Ping Zhu;Bing-Hui Zhao;Jing-Yun Huang .Preparation of p-type ZnO films by Al + N-codoping method[J].Journal of Crystal Growth,2004(1/2):127-132. |
| [8] | T(U)ZEMEN S;XIONG G;WILKINSON J et al.Production and properties of p-n junctions in reactively sput-tered ZnO[J].Physica B:Condensed Matter Physics,2001,308-310:1197-1200. |
| [9] | KOBAYASHI A;SNKEY O F;DOW J D .Deep energy levels of defects in the wurtzite semiconductors AlN,CdS,CdSe,ZnS,ZnO[J].Physical Review B:Condensed Matter,1983,28:946-956. |
| [10] | MINEGISHI K;KOIWAI Y;KIKUCHI Y et al.Growth of p-type zinc oxide films by Chemical Vapor Deposition[J].Japanese Journal of Applied Physics,1997,36:1453-1455. |
| [11] | N. Y. Garces;N. C. Giles;L. E. Halliburton;G. Cantwell;D. B. Eason;D. C. Reynolds;D. C. Look .Production of nitrogen acceptors in ZnO by thermal annealing[J].Applied physics letters,2002(8):1334-1336. |
| [12] | LOOK D C;REYNOLDS D C;PERKINS C L et al.Characterization of homoepitaxial p-type ZnO grown by molecular beam epitax[J].Applied Physics Letters,2002,81:1830-1832. |
| [13] | A.N. Georgobiani;A.N. Gruzintsev;V.T. Volkov;M.O. Vorobiev;V.I. Demin;V.A. Dravin .p-Type ZnO:N obtained by ion implantation of nitrogen with post-implantation annealing in oxygen radicals[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2003(1/3):117-121. |
| [14] | Pearton SJ;Norton DP;Ip K;Heo YW;Steiner T .Recent advances in processing of ZnO[J].Journal of Vacuum Science & Technology, B. Microelectronics and Nanometer Structures: Processing, Measurement and Phenomena,2004(3):932-948. |
| [15] | B. S. Li;Y. C. Liu;Z. Z. Zhi .Optical properties and electrical characterization of p-type ZnO thin films prepared by thermally oxiding Zn_3N_2 thin films[J].Journal of Materials Research,2003(1):8-13. |
| [16] | Chemical vapor deposition-formed p-type ZnO thin films[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2003(4):1342-1346. |
| [17] | Xin-Li Guo;Hitoshi Tabata;Tomoji Kawai .p-Type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N_2O plasma[J].Optical materials,2002(1):229-233. |
| [18] | Jingyun Huang;Zhizhen Ye;Hanhong Chen;Binghui Zhao;Lei Wang .Growth of N-doped p-type ZnO films using ammonia as dopant source gas[J].Journal of Materials Science Letters,2003(4):249-251. |
| [19] | Realization of p-type ZnO thin films via phosphorus doping and thermal activation of the dopant[J].Applied physics letters,2003(1):63-65. |
| [20] | Deuk-Kyu Hwang;Kyu-Hyun Bang;Min-Chang Jeong;Jae-Min Myoung .Effects of RF power variation on properties of ZnO thin films and electrical properties of p―n homojunction[J].Journal of Crystal Growth,2003(3/4):449-455. |
| [21] | J. M. Bian;X. M. Li;C. Y. Zhang;L. D. Chen;Q. Yao .Synthesis and characterization of two-layer-structured ZnO p-n homojunctions by ultrasonic spray pyrolysis[J].Applied physics letters,2004(19):3783-3785. |
| [22] | Bang KH.;Hwang DK.;Park MC.;Ko YD.;Yun I.;Myoung JM. .Formation of p-type ZnO film on InP substrate by phosphor doping[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2003(3/4):177-182. |
| [23] | Ryu YR.;Look DC.;Wrobel JM.;Jeong HM.;White HW.;Zhu S. .Synthesis of p-type ZnO films[J].Journal of Crystal Growth,2000(1/4):330-334. |
| [24] | Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition[J].Applied physics letters,2003(1):87-89. |
| [25] | R. E. Sherriff;D. C. Reynolds;D. C. Look .Photoluminescence measurements from the two polar faces of ZnO[J].Journal of Applied Physics,2000(6):3454-3457. |
| [26] | Sukit Limpijumnong;S. B. Zhang;Su-Huai Wei;C. H. Park .Doping by Large-Size-Mismatched Impurities: The Microscopic Origin of Arsenic-or Antimony-Doped p-Type Zinc Oxide[J].Physical review letters,2004(15):155504.1-155504.4. |
| [27] | YAMAMOTO T;YOSHIDA H K .Solution using a codoping method to unipolarity for the fabrication of p -type ZnO[J].Japanese Journal of Applied Physics,1999,38:L166-L169. |
| [28] | JOSEPH M;JABATA H;KAWAI T .p-type electrical conduction in ZnO thin films by Ga and N codoping[J].Japanese Journal of Applied Physics,1999,38:L1205-L1207. |
| [29] | K. Nakahara;H. Takasu;P. Fons .Growth of N-doped and Ga+N-codoped ZnO films by radical source molecular beam epitaxy[J].Journal of Crystal Growth,2002(Pt.1):503-508. |
| [30] | Toru Aoki;Yoshinori Hatanaka;David C. Look .ZnO diode fabricated by excimer-laser doping[J].Applied physics letters,2000(22):3257-3258. |
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