在蓝宝石(α-Al2O3)衬底上利用射频磁控反应溅射法制备出SiO2/Si3N4双层增透膜系,并对镀膜后的蓝宝石进行了高温强度测试及其透过率的研究.研究表明:镀膜后蓝宝石的高温强度和透过率均有明显提高;800℃时,镀膜蓝宝石的高温强度比未镀膜提高了41.0%;在3～5μm波段范围内,室温下镀膜后透过率比镀膜前提高8.0%;SiO2/Si3N4膜系具有较高的热稳定性,且与蓝宝石衬底附着良好.
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